Técnicas de diagnóstico de plasma aplicadas à descarga em barreira dielétrica gerada em placas paralelas

Abstract

The present work aims to obtain a better knowledge of the physical quantities of the plasma production process and how they behave through the parameters adopted in the process. For this purpose, three characterization techniques were used. The first one was Optical Emission Spectroscopy (OES), a tool for the diagnosis of plasma, and it was possible to identify the excited species present in the plasma produced. The second technique used was the method of the Lissajous Figures, this technique is effective and accurate for a complete electrical characterization of DBD equipment. The third, known as the Langmuir probe technique used to obtain data of electronic temperature, ion density and electron density. The electronic temperature measured in diffuse and filament DBD regimes were 20.69 eV and 27.96 eV, respectively. However, the density of the electrons had the opposite behavior, presenting higher value for the diffuse, 1.56x 1021m-3 , and the value found for the filament regime was 1.09x1021m-3 , these values were in agreement with the active species generated within the plasma as well as the spectral intensity. Confronting these values with the electric ones obtained by the Lissajous Figures, a complete characterization of the produced plasma was possible.